Evolution of Wavelength Shrinkage in LithographyKAMEYAMA, Masaomi; MCCALLUM, Martin; OWA, Soichi et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7281, issn 0277-786X, isbn 978-0-8194-7541-1, 728102.1-728102.6Conference Paper

Design, manufacturing, and testing of micro- and nano-optical devices and systems (26-29 April 2010, Dalian China)Tianchun Ye; Sen Han; Kameyama, Masaomi et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7657, issn 0277-786X, isbn 978-0-8194-8087-3, 1 vol, isbn 978-0-8194-8087-3Conference Proceedings

Analysis of silicon-based optical racetrack resonator for acceleration sensingWENQIN MO; HUAMING WU; DINGSHAN GAO et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7657, issn 0277-786X, isbn 978-0-8194-8087-3, 765704.1-765704.6Conference Paper

Focusing and leveling in dual stage lithographic systemJINLONG LI; LIXIN ZHAO; SONG HU et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7657, issn 0277-786X, isbn 978-0-8194-8087-3, 76571H.1-76571H.7Conference Paper

Numerical Calculation of Optical Probe's Polarization CharacteristicsPENG HAO; ZHENXIAN ZHAN; YUNLIANG WU et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7657, issn 0277-786X, isbn 978-0-8194-8087-3, 76570D.1-76570D.7Conference Paper

Research on Focusing Technique Based on Dual-phase Lock-in Amplifier in 193nm Lithography SystemFEI XIE; XIAOPING TANG; SONG HU et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7657, issn 0277-786X, isbn 978-0-8194-8087-3, 76571D.1-76571D.8Conference Paper

Phase demodulation method for fringe pattern In alignment of nanometer lithographyFENG XU; SONG HU; ZHENGQUAN LUO et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7657, issn 0277-786X, isbn 978-0-8194-8087-3, 76571B.1-76571B.5Conference Paper

Positioning scheme based on Grating modulation and phase imaging in lithographySHAOLIN ZHOU; FENG XU; SONG HU et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7657, issn 0277-786X, isbn 978-0-8194-8087-3, 76571G.1-76571G.6Conference Paper

An optical modulation based focus method for optical projection lithographyWANGFU CHEN; SONGHU.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7657, issn 0277-786X, isbn 978-0-8194-8087-3, 76571J.1-76571J.6Conference Paper

Fast, high efficiency and cost-effective laser nano-lithographyPENG, C. S; TAN, C.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7657, issn 0277-786X, isbn 978-0-8194-8087-3, 765708.1-765708.5Conference Paper

Optical Design and Error Analyses of Lens for Observing the Fiber Core Based on the Software ZEMAXJINGLU SUN; XIANGNING LI; XUTING WU et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7657, issn 0277-786X, isbn 978-0-8194-8087-3, 76570U.1-76570U.6Conference Paper

Study on mechanical properties and damage behaviors of Kevlar fiber reinforced epoxy composites by digital image correlation technique under optical microscopeXIANG GAO; WENQUAN SHAO; HONGWEI JI et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7657, issn 0277-786X, isbn 978-0-8194-8087-3, 76571L.1-76571L.6Conference Paper

Research on VCSEL of Single Mode Multilayer Photonic CrystalWENCHAO LI; ZHENGJUN LIU; XIAOPENG SHA et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7657, issn 0277-786X, isbn 978-0-8194-8087-3, 76570O.1-76570O.5Conference Paper

Research on exposure model for DMD-based digital gray-tone maskNINGNING LUO; YIQING GAO; SHUAI HE et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7657, issn 0277-786X, isbn 978-0-8194-8087-3, 765712.1-765712.6Conference Paper

Study on residual stresses in Ultrasonic Torsional Vibration Assisted Micro-millingLU, Zesheng; HU, Haijun; SUN, Yazhou et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7657, issn 0277-786X, isbn 978-0-8194-8087-3, 76571F.1-76571F.5Conference Paper

Dynamic adjustment system of Space-borne Fourier Transform SpectrometerWEI HUANDONG; HUA JIANWEN; WANG ZHANHU et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7657, issn 0277-786X, isbn 978-0-8194-8087-3, 76570N.1-76570N.10Conference Paper

Experimental Verification of the Inverse Doppler Effect in Negative-index MaterialLIE FENG; JIABI CHEN; YAN WANG et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7657, issn 0277-786X, isbn 978-0-8194-8087-3, 76571A.1-76571A.7Conference Paper

Moire fringe method of using warping deformation measurement of electronic componentsHUANG YANPING; HUANG BIAOBING; XU HONGJI et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7657, issn 0277-786X, isbn 978-0-8194-8087-3, 76571K.1-76571K.6Conference Paper

Poly (ethylene terephthalate) (PET) micro/nanostructures fabricated by nanoimprint and its applicationsXUDI WANG; JIAN JIN; QISHENG TANG et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7657, issn 0277-786X, isbn 978-0-8194-8087-3, 765710.1-765710.6Conference Paper

Soft substrate as a sacrificial layer for fabrication free-standing SU-8-based nanofluidic systemXIAOJUN LI; XUDI WANG; JIAN JIN et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7657, issn 0277-786X, isbn 978-0-8194-8087-3, 76570Z.1-76570Z.7Conference Paper

The impact of manufacturing errors of domain structure on frequency doubling efficiency in PPLN waveguidesZHENGYING LIU; AIHONG REN; RONGZHU ZHANG et al.Proceedings of SPIE, the International Society for Optical Engineering. 2010, Vol 7657, issn 0277-786X, isbn 978-0-8194-8087-3, 76570W.1-76570W.5Conference Paper

Application of Support Vector Machines in the Micro SpectrometerXIONG, Yu Hong; WEN, Zhi Yu; XU, Shao Ping et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7284, issn 0277-786X, isbn 978-0-8194-7544-2 0-8194-7544-0, 1Vol, 72840V.1-72840V.5Conference Paper

Design of optical coherence tomography probe using a 2-axis MEMS scanning mirrorWANG DAJIA; SHI GUOHUA; LI ZHANG et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7284, issn 0277-786X, isbn 978-0-8194-7544-2 0-8194-7544-0, 1Vol, 72840Y.1-72840Y.7Conference Paper

Development of a 20X Schwarzschild projection optics for principle experiment of EUV at-wavelength interferometryLIU KE; LI YANQIU.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7284, issn 0277-786X, isbn 978-0-8194-7544-2 0-8194-7544-0, 1Vol, 72840E.1-72840E.6Conference Paper

Highly Reflective Optical Coatings from Vacuum Ultraviolet to Near Infrared for Micro MirrorsYANG MINGHONG; TONG XINLING; ZHOU CIMING et al.Proceedings of SPIE, the International Society for Optical Engineering. 2009, Vol 7284, issn 0277-786X, isbn 978-0-8194-7544-2 0-8194-7544-0, 1Vol, 728407.1-728407.9Conference Paper